The Perkin-Elmer 4400 Series systems yield excellent films for a wide variety of materials including aluminum alloys, platinum silicide, titanium-tungsten, nichrome-gold, silicon nitride, silicon dioxide, precious metals and permalloy.ĭeposition Of Thin Film for VLSI Geometries Total Control of Critical Film Characteristics Operating models include DC magnetron, RF magnetron, RF diode, bias sputter, reactive sputter, co-sputter and RF etch. The Perkin-Elmer 4400 Series provides a broad choice of target materials, machine operating models, pressure and gas controls, cathode configurations and power levels. Consistently clean vacuum conditions assure reproducible high quality films. Easy loading pallet designs reduce wafer breakage. Simplicity of mechanical design with a minimum number of moving parts in the process chamber minimizes the generation of defect-causing.
High throughput are achieved for a full range of substrate sizes and shapes.Ī rotating substrate table for multi-pass deposition helps assure high uniformity and run-to-run repeatability. The Perkin-Elmer 4400 Series fast cycle load lock, cryogenic pump, and full flood Meissner trap ensures quick turnaround on batch loads. The Perkin-Elmer 4400 Series, designed specially for high throughput production environments, features a high capacity load lock and a broad range of operating models to accommodate virtually any thin film coating requirement. Versatile Systems For Any Sputtering Need Every Perkin Elmer sputtering system was supported by years of technological experience and backed by a worldwide sales and service organization dedicated to prompt courteous service. The highest quality construction and components assure reliable operation and an ultra clean vacuum environment to yield consistently reproducible results. The 4400 Series were designed for flexibility offering a wide range of operating and process modes. Quality, performance and stability backed by more than two decades of experience in vacuum technology and UHV design were built into every Perkin Elmer sputtering system. The Perkin Elmer Series sputtering systems were used not only in the production of semiconductor devices but also in the development and manufacturing of thin film recording heads, thin film resistors and capacitors, optical coatings, gallium arsenide lasers and fiber optics. With an installed base of more than thousands of systems, Perkin-Elmer was a leading supplier of sputter deposition equipment for high technology application in 1990’s. The Perkin Elmer 4400 and Perkin-Elmer 2400 Series sputtering systems were designed to meet the changes of this changing technical environment, whether in development or production. Equally important, the team at Perkin-Elmer Sputter carries decades of experience working with and servicing Perkin Elmer Sputter Equipment.Īs new commercial and industrial technologies emerged and grew, so did the use of sputtering as a technique for deposition thin films of desired characteristics. That’s why Perkin-Elmer Sputtering Systems were the most popular for semiconductor industry in 1990’s for 2 to 8 inch wafers. Perkin-Elmer Sputter Systems are legendary for reliability, versatility, lasting value and lowest total cost of operation.
Time equals money for our customers, and they value the speed and responsiveness of our maintenance and repair professionals. Our customers rely on our products and services for running their businesses efficiently and maximizing profits in their operations. That’s why Perkin-Elmer Sputter continually maintains a large inventory of Perkin-Elmer 2400, Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450,Perkin-Elmer 4480 sputtering systems. On the other hand, no single equipment is perfect for every application or job site. Our responsibility is to provide you with equipment that’s engineered to be long-lasting and reliable and to offer the service and parts support necessary to keep you and your equipment on the job.
However, we also know that every piece of sputter equipment is a vital component in your business’ success and an investment in your company’s future. We realize that the purchase of sputter equipment and/or other semiconductor equipment represents a substantial investment. Perkin-Elmer Sputter is proud to be your best source for both. It’s about finding the total range of capabilities to supply and support your sputter operation. You are here: Home PERKIN-ELMER SPUTTER Production-Proven Sputter EquipmentĬhoosing the right Sputter Equipment vendor involves more than finding a vendor with a large selection of sputter equipment.